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Mô tả
Hãng sản xuất : Brooks InstrumentXuất xứ Pháp
Hãy liên hệ với chúng tôi để được hỗ trợ tốt nhất !
Nguyễn Hoàng Tài
Tel: 0915 031 817 or 01686 530 609
Email: sale10@tmpvietnam.com
hoangtai.tmpvietnam@gmail.com
Features
- Long-term zero stability of <±0.5% full scale per year
- Ultra-fast settling times: 300 ms - <700 ms
- Full-scale flow rates up to 300 slpm
- Ultra-high purity flow path - 4µ inch Ra surface finish
- SEMI F20 compliant wetted materials
- Corrosion-resistant Hastelloy® T-Rise sensor with high speed ARM processor
- Fast acting, diaphragm-free valve assembly is unaffected by differential pressure and tested for over seven million cycles without any failures
- MultiFloTM technology offers unparalleled flexibility—one device can be programmed for thousands of different gas and flow range configurations without removing the MFC from the gas line or compromising accuracy
- Local display indicates flow, temperature, pressure and network address for easy troubleshooting of gas supply and isolation valve issues
- Optional High Accuracy configuration
- DeviceNetTM, RS-485 L-Protocol and analog interfaces
Benefits
- By combining Brooks' patented flow sensor technology with a fast acting diaphragm free valve assembly, the GF125 Series delivers up to 3 times faster response and settling time compared to other mass flow controllers
- Optimized wetted flow path for improved dry-down
- With MultiFloTM, MFC full scale flow range can be re-scaled down typically by a factor of 3:1 with no impact on accuracy, turndown or leak by specifications, for optimum process and inventory flexibility
- A full gas database delivers the widest process gas coverage
- Pressure Transient Insensitivity (PTI) capability overcomes limitations of conventional MFCs that react strongly to small inlet pressure fluctuations. The result is stable performance and predictable accuracy.
- GF125 High Accuracy (HA) with superior low setpoint accuracy makes it possible to replace two (a high and low flow) mass flow controllers with one, providing immediate cost savings while freeing up a gas line for greater gas panel flexibility.
- Convenient user display and independent diagnostic/service port aids device installation, monitoring and troubleshooting
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GF125
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GF125HA
|
GF126
|
|
| Differentiator |
Ultra-High Purity Ultra-Fast Response Time Pressure Transient Insensitivity |
High Accuracy |
High Flow Rate |
| Flow Range (Full Scale Capacity) | 3 sccm - 55 slm |
5 sccm - 10 slm N2 Eq. |
55 slm - 300 slm |
| Surface Finish | 4µ inch Ra | 4µ inch Ra | 4µ inch Ra |
| Accuracy |
±1% S.P. > 35-100% ±0.35% F.S. 2-35% |
±1% S.P. 10-100% F.S. ±1% S.P. plus ±0.04% F.S. 1-10% F.S. |
±1% S.P. > 35-100% ±0.35% F.S. 2-35% |
| Repeatability | < ±0.15% S.P. | < ±0.15% S.P. | < ±0.15% S.P. |
| Response Time |
Normally Closed Valve 300ms (3-860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-30000 sccm N2 Eq.) <700ms (30001-55000 sccm N2 Eq.)
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Normally Closed Valve 300ms (<860 sccm N2 Eq.) 400ms (861-7200 sccm N2 Eq.) 500ms (7201-10000 sccm N2 Eq.) |
Normally Closed Valve <1 sec
|
| Response Time |
Normally Open Valve <1.5 sec |
Normally Open Valve — |
Normally Open Valve — |
| Multi-Gas & Range Configurability | MultiFlo™ Standard | — | MultiFlo™ Standard |
| Pressure Transient Insensitivity |
±5% S.P. up to 5 psi/sec upstream press. spike |
± 5% S.P. for up to 5 psi/sec upstream press. spike |
Ability to measure inlet pressure |
| Diagnostic Capability |
Status Lights - MFC Health, Network Status Alarms - Control Valve Output, Network Interruption |
Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption |
Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption |
| Analog Communication |
0-5 Vdc |
0-5 Vdc |
0-5 Vdc |
| Digital Communication |
RS485 L Protocol DeviceNet™ |
RS485 L Protocol DeviceNet™
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RS485 L Protocol DeviceNet™
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Mass Flow Controller
Ultra-High Purity
Ultra-Fast Response Time
Pressure Transient Insensitivity
3 sccm - 300 slm
±1% S.P. > 35-100%
±0.35% F. S. 2-35%
±0.5% F.S. (included in accuracy)
300ms - < 1 sec
Normally Open Valve: <1.5 sec
(specific models only)
<5% S.P. for up to 5 psi/sec upstream press. spike
< 5 - 100%
Standard GF Series: 11 bins
High Flow GF Series: 4 bins
< 2% F.S.
Span: 0.05% S.P. per °C
Zero: 0.005% F.S. per °C
Metal
SEMI F20 HP Compliant
316L VIM/VAR
Hastelloy C-22
316L Stainless Steel
304 Stainless Steel
KM-45
Normally Closed
Normally Open (specific models)
Meter (no valve)
3-860 sccm = 7-45 psid
861 - 7200 sccm = 10 - 45 psid
7201 - 55000 sccm = 15 - 45 psid
51 - 300 slm = 30 - 90 psid
*Typical pressure drops. Contacts Brooks Technical Support for more information.
Standard GF Series: 100 psia max
High Flow GF Series: 75 psig (controller), 150 psig (meter)
MFC Health
Network Status
Control Valve Output
Network Interruption
RS485 via 2.5mm jack (all models)
Top Mount Integrated LCD
Viewing Angle: Fixed
Viewing Distance: 10 feet
Units Displayed: Flow (%), Temp (°C), Pressure (psia, kPa)
Resolution: 0.1 (unit)
0-5 Vdc
DeviceNet™
RS485 L-Protocol
Analog/RS485 via 9-Pin "D" connector
DeviceNet™ via 5-Pin "M12" connector
Various cable adaptors available. See product data sheet for more information.
Analog/RS485 L Protocol: 6 Watts max @ ±15 Vdc (±10%) or +24 Vdc (±10%)
DeviceNet™: 545 mA max @ +11-25 Vdc, 250 mA max @ 24 Vdc
(Under typical operating conditions)
EC Directive 2004/108/EC
CE: EN61326-1: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
Người gửi / điện thoại
Mọi thông tin chi tiết vui lòng liên hệ theo thông tin bên dưới để được tư vấn rõ hơn:
Mr. Tài
Hotline: 01686.530.609 - 0915.031.817
mail: sale10@tmpvietnam.com - hoangtai.tmpvietnam@gmail.com
Địa chỉ: 602/41E, Điện Biên Phủ, P22, Quận Bình Thạnh, Tp HCM